[低温泵入门 6 ]低温泵保养的必要性和条件
2026-09-19
Seven key points for maintenance
To maintain good performance of a cryopump;
Although our cryopumps are designed to provide high reliability and long-time continuous operation, it is necessary to perform maintenance works on a regular basis.
It is important to perform daily checks to prevent failure.
Seven key points
[Cryopump Assembly]
| 1. | Cryopanel temperature (Check temperature of cryopanels) |
→ | Below 20K: Normal Above 20K: Abnormal |
| 2. | Shield temperature (Check the electromotive force of CA thermocouple) |
→ | -5.5mV～-7.0mV: Normal -5.5mV以上: Abnormal (When ambient temperature is 20°C) |
| 3. | Cryopump sound, vibration (hearing, bodily sensation) |
→ | Periodic: Normal Irregular: Abnormal |
[Compressor Unit]
| 4. | Helium charge pressure while a compressor is in operation (Read SUPPLY pressure gauge of a compressor unit) |
→ | Charge pressures vary depending on the models. Refer to compressor instruction manual for the appropriate values. |
| 5. | Elapsed time meter(E.T.M) (Check the total operation time on ETM of a compressor unit) |
→ | Maintenance intervals vary depending on the models. Refer to compressor instruction manual and replace adsorbers, coldhead seals or bearings. |
| 6. | Sound or vibration of a compressor unit while in operation. (by hearing or sensing bodily) |
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| 7. | Cooling water flow rate, inlet temperature (with water-cooled types) | → | Refer to compressor unit instruction manual |
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